EZ4 Compact Vacuum Spin Coater (EZ4-S / EZ4-S-PP)

The EZ4-S is a high-performance, compact vacuum spin coater designed to produce highly uniform thin-film coatings. Its small footprint makes it ideal for installation in a fume hood or glove box. The upgraded controller stores up to five recipes, each with up to five programmable spin steps, enabling repeatable multi-step coating processes.

Features;

• Compact design suitable for glove box operation

• Corrosion-resistant transparent cover with constant-torque positioning chain

• Integrated chamber design for easy disassembly, cleaning, and part replacement

• LCD text display with color-coded keys for simple operation

• Brushless DC motor; recommended maximum coating size: 4-inch round substrates

• Housing options: Aluminum alloy shell (EZ4-S); optional corrosion-resistant PP shell (EZ4-S-PP)

  
  

Specifications;

• Chamber Size: Ø200 mm

• Maximum Sample Size: 4 inch (100 mm) wafer/substrate

• Vacuum Chucks (included): 3 standard chucks

• Chuck O.D.: 10 mm, 25 mm, 50 mm

• Spin Speed: 100–9,999 rpm

• Speed Accuracy: ±2 rpm

• Speed Resolution: 1 rpm

• Spin Control: Programmable; 5 recipes × 5 steps each

• Maximum Spin Time: 3000 s

• Time Resolution: 1 s

• Dimensions (W×D×H): 250 × 210 × 220 mm

• Weight: 16 kg

• Power: 200–230 VAC, 50 Hz

  
  

Accessories (Included);

• Oil-free vacuum pump, power cord, and user manual

Brand/Origin;

• China (local brand)